Jun Sakuma
Lasertec Corporation
Solid-state DUV laser sources for semiconductor inspection tools
13:00-14:00
OPIC2025 Tutorial Session
All registrants can attend the tutorial session for free.
Tutorial 1 Monday, 21 April 2025
Abstract
While extreme ultraviolet lithography (EUVL) is used to produce cutting-edge semiconductor devices, deep ultraviolet (DUV) lasers continue to play a crucial role. Excimer lasers are widely used as exposure light sources in the production of advanced devices. Additionally, continuous-wave (CW) and quasi-continuous-wave (QCW) ultraviolet (UV) lasers, based on nonlinear frequency conversion, are essential for inspection applications, even in EUVL processes. This tutorial reviews recent technological trends in solid-state DUV light sources developed for semiconductor inspection tools.
Biography
He serves as a Senior Technical fellow at Lasertec Corporation, specializing in the development of DUV light sources through nonlinear frequency conversions. He earned his Ph.D. from Keio University and is a Senior Member of Optica.
Hideki Hirayama
Quantum Optodevice Laboratory, RIKEN
Recent progress of AlGaN-based deep-UV LEDs and LDs and their applications
14:15-15:15
Abstract
AlGaN-based deep-ultraviolet (UV) LEDs and laser diodes (LDs) have recently made remarkable progress, and are being put into practical use mainly for sterilization applications. This presentation will clearly explain about the recent progresses in increasing the efficiency of UVC LEDs for sterilization applications and 230 nm-band far-UVC LEDs for human harmless virus inactivation, as well as the realization and recent progress of UVC to UVB LDs using polarization induced p-conductive layers.
Biography
Hideki Hirayama received the Ph.D. degrees in physical electronics engineering from Tokyo Institute of Technology (TIT) in 1994. In the same year, he became a research scientist of RIKEN. He became a Team Leader of the Terahertz Quantum Device Research Team in 2005. He got a position of Chief Scientist and Director of Quantum Optodevice Laboratory in 2012. He took on a concurrent position as visiting professor at Saitama University, Tokyo University of Science and Tokushima University in 2004, 2017 and 2019, respectively. His research focuses on crystal growth of AlGaN based nitride-semiconductors and development of deep-ultraviolet light-emitting diodes (DUV-LEDs) and laser diodes (LDs). He is also developing terahertz quantum-cascade lasers (THz-QCLs) based on inter-subband optical transition of semiconductor superlattices. He won a Japan IBM Science Prize in Electronics in 2010, an Ichimura Science Prize in 2011, a Science and Technology Award of the Minister of Education, Culture, Science and Technology in 2014, a Compound Semiconductor Electronics Achievement Award (Isamu Akasaki Award) of the Japan Society of Applied Physics (JSAP) in 2019, etc. He is a JSAP fellow. He was a Chief Executive Editor of JJAP/APEX in 2021-2022.
Masanao Kamata
Sony Semiconductor Solutions Corporation
R&D progress of Sony’s surface emitting laser technology
15:30-16:30
Abstract
Due to the attractive features such as high-beam quality, easiness of array arrangement, wafer-level fashion of the manufacturing process that can not be seen in edge-emitting lasers, surface emitting lasers are promising for versatile applications including optical communication, laser lightning, and laser sensing such as LiDAR. In this regard Sony’s surface emitting laser technologies are reviewed firstly and then how our VCSEL technology has led to the development of WL-DPSSEL(Wafer-level diode-pumped solid-state surface emitting laser).
Biography
Masanao Kamata received the Ph.D degree in electrical engineering from Keio University. He joined Sony corporation and then moved to Sony Semiconductor Solutions and now serves as a senior manager and is responsible for the development of diode-pumped solid-state surface-emitting laser. He was also former visiting scientist at Harvard University and Keio University.
Kazuue Fujita
Central Research Laboratory, Hamamatsu Photonics K.K.
Engineering research on Quantum Cascade Lasers and its development to room temperature terahertz semiconductor source
16:45~17:45
Abstract
Quantum cascade lasers (QCLs) are mid-infrared and terahertz semiconductor laser sources based on intersubband transitions in semiconductor quantum wells. After more than two decades of research and development, high-performance, continuous-wave mid-infrared QCLs with very broad gain-width have been developed for industrial applications. Besides, relying on the dual-upper-state active regions, THz QCL devices have demonstrated drastic improvements in performance in recent years and can now produce terahertz radiation from 0.2 to 6 THz with power output sufficient for imaging and spectroscopic applications.
Biography
Dr. Kazuue Fujita is a senior researcher of Central Research Laboratory at Hamamatsu Photonics KK., Shizuoka, Japan. He received the M.S. degree in electronics engineering from Tohoku University, Sendai, Japan, in 2005. In April 2005, he joined Hamamatsu Photonics KK, where he was engaged in the research on quantum cascade lasers. In September 2014, he received the Ph.D. degree in electronic engineering from Kyoto University, Kyoto, Japan. Since October 2023, he has been serving as the Project Leader of Focused Research Project at the Central Research Laboratory. His research interests include mid-infrared and terahertz quantum-cascade lasers, and novel intersubband devices in semiconductor nanostructures. He was a recipient of the 24th (2022) Optical and Quantum Electronics Achievement Award (Takuma Award) from the Japan Society of Applied Physics, the 2022 SCOPE Research and Development Encouragement Award from the Ministry of Internal Affairs and Communications, the 10th (2021) RIEC Award from the Research Institute of Electrical Communication at Tohoku University, and the 34nd (2018) Kenjiro Sakurai Memorial Award for the development of quantum cascade lasers. He is a Senior Member of IEEE and a member of the Japan Society of Applied Physics and the Institute of Electronics, Information and Communication Engineers.
Tutorial 2 Tuesday, 22 April 2025
Koji Sugioka
RIKEN Center for Advanced Photonics
High performance laser processing with short wavelength and short pulse lasers
13:00-14:00
Abstract
Lasers have become an indispensable tool for manufacturing. The short wavelength and short pulse width are essential for high performance material processing to achieve high quality and high fabrication resolution. This lecture reviews the fundamentals of interaction of the short wavelength and short pulse lasers with materials and then introduce relevant applications.
Biography
Koji Sugioka received his B. S., Ms. Eng., and Dr. Eng. Degrees in electronics from Waseda University (Japan) in 1984, 1986, and 1993, respectively. He Joined RIKEN in 1986 and is currently a Team Leader of Advanced Laser Processing Research Team at RIKEN Center for Advanced Photonics. He was awarded the degree of Doctor Honoris Causa from University of Szeged (Hungary) in 2018. Koji Sugioka is currently a board of trustee member of Laser Institute of America (LIA) and a member of board of directors of Japanese Laser Processing Society (JLPS) and the Japan Society of Laser Technology. He is a Fellow of LIA, the International Society for Optics and Photonics (SPIE), the Optical Society of America (OSA, now Optica), and the Intl. Academy of Photonics and Laser Engineering (IAPLE). He is also an editor-in-chief of Journal of Laser Micro/Nanoengineering (JLMN), and an editor of International Journal of Extreme Manufacturing (IJEM), Opto-Electronic Advances (OEA), and Nanomaterials.
Satoshi Hasegawa
Center for Optical Research and Education (CORE), Utsunomiya University
Laser processing with machine learning
14:15-15:15
Abstract
In recent years, advances in AI technology have been remarkable, and numerous examples of machine learning applications in laser processing have been reported. Machine learning applications in laser processing can be broadly classified into three categories: “before laser processing,” “during laser processing,” and “after laser processing.” This presentation will highlight specific examples of machine learning applications within these categories.
Biography
Satoshi Hasegawa is currently an Associate Professor at the Center for Optical Research and Education, Utsunomiya University, Japan. He earned his Ph.D. from Utsunomiya University in 2010. In 2023, he founded a startup company, Holodesign Inc., and assumed the role of CEO. His research interests include laser material processing, computer-generated holography, and AI applications in optics.
Shigeki Tokita
Institute for Chemistry, Kyoto University
Advances in Mid-Infrared Laser Technologies: Fiber and Solid-State Sources, Ultrafast Pulse Generation, and Emerging Applications
15:30-16:30
Abstract
This tutorial provides an overview of recent advances in mid-infrared laser technologies, covering fiber and solid-state sources, novel approaches to ultrafast pulse generation, and emerging application areas. We will explore key design principles, highlight performance metrics for high-power operation, and discuss how these breakthroughs enable new opportunities in spectroscopy, materials processing, and nonlinear optics. Attendees will gain an understanding of fundamental concepts and future research directions in this rapidly evolving field.
Biography
Dr. Shigeki Tokita received his Ph.D. in Engineering from Osaka University in 2006. That same year, he joined the Institute for Chemical Research at Kyoto University as an Assistant Professor. In 2013, he was appointed Lecturer at the Institute of Laser Engineering, Osaka University, and later promoted to Associate Professor in 2021. He became Professor at the Institute for Chemical Research, Kyoto University in 2022. His research focuses on laser engineering and plasma physics, with notable achievements in high-power pulsed lasers, femtosecond lasers, mid-infrared high-power lasers, high-intensity terahertz wave generation, and laser-driven electron beam acceleration.
Takeshi Yasui
Institute of Post-LED Photonics, Tokushima University
Optical Frequency Combs: Unlocking High-Precision Optical Sensing and Advanced Imaging
16:45-17:45
Abstract
Optical frequency combs have revolutionized precision frequency metrology and spectroscopy by providing unparalleled accuracy and versatility. This tutorial explores the principles, breakthroughs, and emerging applications of frequency-comb-based optical sensing and advanced imaging techniques from a novel perspective, distinct from traditional approaches based on the concept of frequency rulers, highlighting innovative developments and future directions. Attendees will gain insights into the transformative potential of frequency combs in addressing challenges across science, industry, and medicine, paving the way for next-generation optical technologies.
Biography
Takeshi Yasui received a Ph.D. in engineering from the University of Tokushima in 1997 and a Ph.D. in medical science from Nara Medical University in 2013. He has held positions at the National Research Laboratory of Metrology, Osaka University, and as an Invited Professor at the University of Bordeaux and the University of Littoral Cote d’Opale. He is currently the Chief Research Officer (CRO) and Professor at the Institute of Post-LED Photonics, Tokushima University, Japan. Dr. Yasui has received several prestigious awards, including the Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science, and Technology. His research focuses on THz photonics, optical frequency combs, and biomedical optics.